GHW-12Z ENI 射频等离子体发生器

产品描述

GHW-12Z ENI射频等离子体发生器产生射频等离子体。

特征：

具有自我寻址、自我定位、自动I/O检测等特点。

GHW-12Z ENI射频等离子体发生器是一种高性能、高可靠性的射频电源，专为产生射频等离子体而设计。

GHW-12Z ENI射频等离子体发生器采用先进的射频技术和控制电路，具有快速响应、高精度、高稳定性等特点。同时，它还具备自我保护和故障诊断功能，确保设备的长期稳定运行。

GHW50 13.56 MHz、5 kW射频等离子体发生器提供经过现场验证的可靠性、卓越的稳定性和无与伦比的可重复性，可实现高正常运行时间和工艺良率。GHW系列射频等离子体发生器可提供208 VAC和400/480 VAC电压。GHW RF等离子体发生器非常适合集成电路、平板显示器和数据存储设备制造过程中的等离子体增强化学气相沉积(PECVD)、高密度等离子体CVD(HDPCVD)、蚀刻和其他薄膜应用。

应用领域

GHW-12Z ENI射频等离子体发生器广泛应用于主要应用于半导体行业、材料科学、生物医学等领域，如等离子体刻蚀、薄膜制备、表面处理等。

Product description

The GHW-12Z ENI RF plasma generator generates RF plasma.

Features:

It has the characteristics of self-addressing, self-positioning, automatic I/O detection and so on.

The GHW-12Z ENI RF Plasma generator is a high performance, high reliability RF power supply specifically designed for generating RF plasma.

The GHW-12Z ENI RF plasma generator uses advanced RF technology and control circuit, which has the characteristics of fast response, high precision and high stability. At the same time, it also has self-protection and fault diagnosis functions to ensure long-term stable operation of the equipment.

The GHW50 13.56 MHz, 5 kW RF plasma generator provides field-proven reliability, superior stability and unmatched repeatability for high uptime and process yield. The GHW series RF plasma generators are available at 208 VAC and 400/480 VAC voltages. GHW RF plasma generators are ideal for plasma enhanced chemical vapor deposition (PECVD), high density Plasma CVD(HDPCVD), etching, and other thin film applications in the manufacturing of integrated circuits, flat panel displays, and data storage devices.

Application field

GHW-12Z ENI RF plasma generators are widely used in the semiconductor industry, materials science, biomedicine and other fields, such as plasma etching, film preparation, surface treatment, etc.
 

UT35A-001-11-00横河通用温度控制器	330103-00-17- 02-00 Bently Nevada 3300 XL 8mm接近传感器系统
2098-DSD-HV150-SE Ultra 3000驱动器与索引	330103-040-00-00 Bently Nevada 3300 XL 8mm接近传感器系统
2094-BC02-M02-S艾伦布拉德利Kinetix 6000驱动组件	3500/15-07-07-00本特利内华达电源模块
abb控制板Rmio-02c套件	2094-EN02D-M01-S0艾伦布拉德利Kinetix 6500控制模块
330704-000-050-90-02-05本特利内华达接近探头	330101-00-12-05-01-00本特利内华达3300 XL 8毫米接近探头
Bently Nevada加速度计加速度传感器	330130-045-12-00 Bently Nevada 3300 XL加长电缆
330703- 100-10-11-15 Bently Nevada 3300 XL 11毫米接近探头	DSQC668 ABB伺服计算机
190501 Velomitor CT速度传感器Bently Nevada	tcp - sc32 MTL仪器MTL HART连接单元
8440-1878伍德沃德数字同步器和负载控制	IS200EGPAG1BEC GE激励栅脉冲放大板
力士乐HCS紧凑型转换器/驱动器控制器	1TGE120010R1001控制单元ABB
8BAC0120.001-2 B&R ACOPOSmulti插件模块	IMHSS05液压伺服模块ABB
FC-PSU-240516 HONEYWELL电源模块	PXIe-4112 NI PXI可编程电源
FC-TSHART-1620M HONEYWELL电源模块	PXIe-4132 NI PXI源测量单元
FC-TSDO-0824霍尼韦尔安全数字输出自由贸易区	vpcd -1- 16v01 - p -1 REXROTH电子信号放大器
FC-TSGAS-1624霍尼韦尔安全数字输出FTA	霍尼韦尔5701系列控制系统
FC-TSDI-16UNI霍尼韦尔安全数字输出自由贸易区	霍尼韦尔5701系列控制系统
ic695niu001 - ad GE以太网接口单元	霍尼韦尔5701系列控制系统
9906-619伍德沃德723PLUS数字控制硬件	HONEYWELL 5701系列控制系统